Surface and Layer State of Thin Au–Al Layers after High-energy Ion Irradiation Measured by RBS, Scanning Ion Microprobe and SEM
نویسندگان
چکیده
The surface and layer state of thin ion-beam-irradiated Au–Al layers was investigated with scanning high-energy ion microscopy (SHEIM), RBS and SEM. The thin metal layers (90 nm Au top layer and 200 nm A layer deposited on polished glassy carbon) were produced by evaporation and subsequently irradiated with 2.0 MeV 4He‘ ions (ion current 300 nA; beam spot diameter 0.5 mm) to initiated the Au–Al interdi†usion process in the layered structure. In situ RBS measurements were performed during irradiation. Both SEM and SHEIM (threedimensional mapping) analysis of as-deposited and ion-beam-irradiated specimens showed the stability of the separated and interdi†used layers. Voids in the interdi†used Au–Al layer and at the specimen surface were not observed. by John Wiley & Sons, Ltd. (
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